MANUFACTURING A REPLICATION TOOL

摘要

In a process of manufacturing, by replication, a plurality of optical elements each having geometrical surface features, a method of manufacturing an element that includes a plurality of replicated structures is provided. The method comprises the steps of providing an element substrate, of replicating, by embossing, a surface of a tool element, which surface comprises a negative copy of the geometrical surface feature, into replication material disposed at a first place on a surface of the element substrate, of subsequently hardening the replication material, of replicating said surface of the tool element into replication material disposed at a second place on said substrate, of hardening said replication material, the method comprising the further step of subsequently filling a gap between replication material disposed at the first place and replication material disposed at the second place by filler material.