| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-cost apparatus for identifying contaminated state that is capable of identifying any partial fouled state, with accuracy and at a high speed. SOLUTION: The apparatus identifies contaminated states on both the front and on the back sides of a plate-shaped object C moving along a conveyance path 12 and includes a plurality of reflecting optical sensors 35c, arranged in a direction perpendicular to the direction of movement of the plate-shaped object C, with each of the plurality of reflecting optical sensors comprising a light projection means 32c and a light reception means 33c, respectively, for the front and back sides of the plate-shaped object C. COPYRIGHT: (C)2010,JPO&INPIT
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