发明名称 SCRIBING WHEEL
摘要 PROBLEM TO BE SOLVED: To provide a scribing wheel capable of generating a vertical crack nearly from a position, in which the "hook" characteristic is so excellent for a brittle material substrate of a high hardness that a vertical crack can be generated shortly from a position, at which a scribe was started.SOLUTION: An inclined plane having a V-shaped section and made of a single crystal diamond or a polycrystalline diamond is formed on the outer circumference of a scribing wheel, and the arithmetic average roughness Ra of the inclined plane is set at 0.01 μm or less. At the portion of a ridge line 13, in which inclined planes 14a and 14b intersect, there are formed grooves 15a and 15b of a constant pitch less than 8 μm. As a result, the "hook" characteristics can be improved in the scribing wheel made of diamond.SELECTED DRAWING: Figure 2
申请公布号 JP2016210169(A) 申请公布日期 2016.12.15
申请号 JP20150243883 申请日期 2015.12.15
申请人 MITSUBOSHI DIAMOND INDUSTRIAL CO LTD 发明人 HAYASHI HIROYOSHI
分类号 B28D5/00;C03B33/10;H01L21/301 主分类号 B28D5/00
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