发明名称 EPIR device and semiconductor devices utilizing the same
摘要 There is provided an EPIR device which is excellent in mass productivity and high in practical utility. The EPIR device includes a lower electrode layer, a CMR thin film layer and an upper electrode layer which are laminated in this order on any of various substrates. A Pt polycrystal thin film 10 forming the lower electrode layer includes columnar Pt crystal grains 10A, 10B, 10C, . . . and over 90% of these crystal grains is oriented to a (1 1 1) face. Columnar PCMO crystal grain groups 20A, 20B, 20C, . . . are respectively locally grown epitaxially on the respective outermost surfaces of the Pt crystal grains 10A, 10B, 10C, Then, the crystal faces of the crystal grains included in the PCMO crystal grain groups 20A, 20B, 20C, . . . and vertical in the substrate surface normal direction are any one of (1 0 0)p, (1 1 0)p and (1 1 1)p planes.
申请公布号 US2005040482(A1) 申请公布日期 2005.02.24
申请号 US20040790238 申请日期 2004.03.02
申请人 SHARP KABUSHIKI KAISHA 发明人 SUZUKI TOSHIMASA;NISHI YUJI;FUJIMOTO MASAYUKI;AWAYA NOBUYOSHI;INOUE KOHJI;SAKIYAMA KEIZO
分类号 H01F10/32;G11C13/00;H01F41/18;H01L21/8246;H01L27/105;H01L43/08;H01L43/10;H01L43/12;H01L45/00;(IPC1-7):H01L27/108 主分类号 H01F10/32
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