| 摘要 |
PROBLEM TO BE SOLVED: To provide a sheet-fed substrate processing apparatus of simple configuration capable of efficiently performing a high quality-substrate processing. SOLUTION: The sheet-fed substrate processing apparatus 1 comprises a support pin 14 on which the processed substrate W is loaded, a rotating table 3 where a substrate catching member 10 comprises chuck pins 15 adjacent to the support pin 14 for supporting the periphery of the processed substrate W disposed with a plurality of predetermined intervals spaced out at an outer periphery, a rotating drive mechanism 4 that is connected to the rotating table 3 and rotates the rotating table 3, and jetting nozzles 16, 18 that supply washing liquid onto the processed substrate W. The chuck pin 15 is formed of a metal-made pin that is overacidity resistant and strong base resistant. COPYRIGHT: (C)2007,JPO&INPIT
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