| 摘要 |
An inspection system for inspecting a sheet of glass comprises an illumin ation module, a collimating lens system, a telecentric imaging lens system a nd a Time Delay Integration line-scan camera. The illumination module has a low coherence light source emitting light. The collimating lens system has a focal point on the main axis thereof on which focal point its light source is located. The collimating lens system produces a collimated sheet of light from the emitted light. This collimated sheet of light passes through the s heet of glass. The telecentric imaging lens system concentrates the sheet of light passed through the sheet of glass on an image formation plane. The Ti me Delay Integration line-scan camera is positioned in a general area of the image formation plane. The camera is equipped with an antiblooming device. In another embodiment, an inspection system for inspecting a sheet of glass comprises a camera and a peripheral RDF illumination module. The camera is p ositioned on and points toward a first side of the sheet of glass. The perip heral RDF illumination module surrounds the camera and is located on the fir st side, outside a field of view of the camera. The RDF illumination module is operative to illuminate the field of view with its RDF emitted light. The RDF illumination module is oriented so that the sheet of glass reflects the RDF emitted light away from the camera. The camera is positioned so as to b e operative to receive the RDF emitted light if a RDF detectable defect is p resent on the sheet of glass and to avoid the RDF emitted light if no RDF de tectable defect is present on the sheet of glass. |
