COPOLYMER COMPOUND FOR INDUCTION SELF-ORGANIZATION, MANUFACTURING METHOD THEREOF AND ARTICLE INCLUDING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a copolymer compound for induction self-organization and a manufacturing method thereof.SOLUTION: The present invention relates to a pattern formation method including: disposing a composition on a substrate where a layer of a brush polymer is lacked; and annealing the composition for promoting domain separation between a first polymer and a second polymer. The composition contains: a block copolymer including the first polymer and the second polymer; and an additional polymer which includes the chemically and structurally same polymer as one of polymers in the block copolymer or in which a bottle brush polymer includes a polymer having a preferential interaction with one of blocks of the block polymer; and a solvent.SELECTED DRAWING: Figure 3(B)