| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the laminating accuracy of a die and a substrate even while reducing costs. Ž<P>SOLUTION: A recessed part 16 is formed on the substrate 11 so as to form a level difference at the outer edge part of a sticking region 15 where the die 13 is to be stuck on the substrate 11 simultaneously with the formation of an alignment mark 17. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
