发明名称 |
Integrated superconductor device and method of fabrication |
摘要 |
An integrated superconductor device may include a substrate base and an intermediate layer disposed on the substrate base and comprising a preferred crystallographic orientation. The integrated superconductor device may further include an oriented superconductor layer disposed on the intermediate layer and a conductive strip disposed on a portion of the oriented superconductor layer, The conductive strip may define a superconductor region of the oriented superconductor layer thereunder, and an exposed region of the oriented superconductor layer adjacent the superconductor region. |
申请公布号 |
AU2014380148(A1) |
申请公布日期 |
2016.06.16 |
申请号 |
AU20140380148 |
申请日期 |
2014.11.10 |
申请人 |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
WANG, CONNIE P.;MURPHY, PAUL;SULLIVAN, PAUL |
分类号 |
H01L21/28;H01L21/768 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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