| 摘要 |
A flow path (3) through which a test solution flows is formed in a sapphire substrate (2) used as a semiconductor element substrate, and, on the substrate (2), an LED (4) and a photodiode (5) are formed by a semiconductor manufacturing process facing each other across the flow path (3). The LED (4) emits light towards the substrate (2), and, when passing through the test solution in the flow path (3), said light is absorbed depending on the concentration, etc. The transmitted light passes through the substrate (2) to reach the photodiode (5), and the photodiode (5) outputs a detection signal that depends on the amount of incident light. In this way, the light source and the optical detector are integrated with the substrate (2), which is a flow cell, thus making the optical analysis device lighter and more compact and doing away with the need for difficult adjustments of the optical axis during device assembly. |
