发明名称 LIGHT EMITTING DIODE AND METHOD OF FABRICATING THE SAME
摘要 A light emitting diode and a method for manufacturing the same are provided to improve the crystal quality by forming an insulating layer pattern between an a-plane(11-20) sapphire substrate and a semiconductor layer. An a-plane(11-20) sapphire substrate(100) is prepared. An insulating layer is formed on the a-plane(11-20) sapphire substrate. The insulating layer is partially etched to form an insulating pattern(224) for exposing parts of the a-plane(11-20) sapphire substrate. A first conductive-type semiconductor layer, an active layer(240), and a second conductive-type semiconductor layer are formed on the a-plane(11-20) sapphire substrate on which the insulating pattern is formed. The insulating pattern is a SiO2 pattern. Alternatively, an intermediate layer including at least one of a buffer layer and an undoped layer is formed on the a-plane(11-20) sapphire substrate, and then the insulating layer is formed on the intermediate layer.
申请公布号 KR20080082326(A) 申请公布日期 2008.09.11
申请号 KR20070023055 申请日期 2007.03.08
申请人 SEOUL OPTO DEVICE CO., LTD. 发明人 CHOI, JOO WON
分类号 H01L33/20;H01L33/12;H01L33/16 主分类号 H01L33/20
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