AFM PRECISION MEASUREMENT METHOD FOR THREE-DIMENSIONAL STRUCTURE OF INDEPENDENT NANOSTRUCTURE, NANOSTRUCTURE SCANNING DEVICE HAVING PLURALITY OF AFM PROBES AND SCANNING METHOD USING SAME

摘要

According to the present invention, provided is an independent nanostructure scanning device having a plurality of AFM probes which have varied resolutions. Such scanning device enables more precise measurement of a nanostructure by confirming the shape and the position of the nanostructure on a specimen by means of high resolution AFM probes and then measuring the three-dimensional shape of the confirmed nanostructure by means of scanning using atomic resolution AFM probes.