| 摘要 |
PROBLEM TO BE SOLVED: To three-dimensionally measure a shape of a workpiece with ease by a generalization phase shift method in which an imaging method is an integration type, and an amount of phase shift of a grating pattern to be projected is arbitrary.SOLUTION: A phase shift analysis device 7 is configured to: input continuous three deformation grating images a, b, and c from an imaging device 6 thereinto to calculate an average square error about luminance values I, I, and Iamong the deformation grating images; obtain an absolute value of a relative amount of phase shift Δφpq among the deformation grating images by use of arccos serving as an inverse trigonometric function from the average square error in which a term expressing an oscillation component of the luminance value is set to 0 and expressed by a sin function; obtain a code of each amount of phase shift Δφpq and its solution κin which an evaluation function f(κ) expressed by a sum of obtained each amount of phase shift Δφpq satisfies a circuit difference phase condition; obtain a value of the amount of phase shift Δφpq including the code; obtain a value of a phase θ of the luminance value from the value of the amount of phase shift Δφpq; and three-dimensionally measure a shape of a workpiece 1.SELECTED DRAWING: Figure 1 |
