| 摘要 |
PROBLEM TO BE SOLVED: To provide an illumination system and a method of working the illumination system.SOLUTION: An illumination system is equipped with a spatial light modulator (SLM) 12, first and second optical systems, a controller 13 and a mask 15. The SLM is so positioned as to receive an incident light beam. A first optical system 14 forms light emitted from the SLM into an image on the mask, which intercepts part of the light. The second optical system 16 forms light emitted from the mask into an image on a sample 17. A controller causes the SLM to display an SLM pattern, which generates an illuminating light beam and a spurious light beam from the incident light beam, and the illuminating light beam passes through the mask. The mask comprises a fixed part having multiple openings, and a movable part which moves relative to the fixed part and has one opening.SELECTED DRAWING: Figure 1 |
