| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning type microscope which can acquire an image of a sample in a range where the sample exists in an optical axis direction even when a three-dimensional shape of the sample changes with the lapse of time. SOLUTION: The scanning type microscope 100 detecting the sample 5 via an objective lens 4 and a pinhole 7 is provided with a driving means for relatively moving the objective lens and the stage, an image producing means for producing image data of the sample, a gaze area setting means for setting a gaze area of the sample, a reference value setting means for setting a reference value for determining existence of the sample and a controlling means which acquires two or more image data at different positions in an optical axis direction by the image producing means, compares the image data in the gaze area with the reference value set by the reference value setting means and controls to stop the driving means when absence of the sample is determined thereby. COPYRIGHT: (C)2007,JPO&INPIT
|
