| 摘要 |
PROBLEM TO BE SOLVED: To provide a fabrication method of a mold for manufacturing an aspherical microlens which has arbitrary flat aspherical surface and has such dimensions that lens diameter is 1 mm or less and thickness is 0.5 mm or more. SOLUTION: A two-layered mask layer is formed on a single crystal silicon substrate, anisotropic etching and isotropic etching are performed by using a first mask layer to form a concave part having a diameter a little smaller than that of a desired microlens mold and, thereafter, isotropic etching is performed and the concave part is magnified by using a second mask layer to provide the microlens mold having a desired dimensions. COPYRIGHT: (C)2007,JPO&INPIT
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