发明名称 METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE HAVING A CHANNEL EXTENDING VERTICALLY
摘要 In a semiconductor device and a method of manufacturing the semiconductor device, the semiconductor device includes a conductive structure, first insulating layers and first conductive layer patterns. The conductive structure includes a first portion, second portions and third portions. The second portions extend in a first direction on the first portion. The second portions are spaced apart from one another in a second direction substantially perpendicular to the first direction. The third portions are provided on the second portions. The third portions are spaced apart from one another in the first and second directions. The first insulating layers cover sidewalls of the second portions. The first conductive layer patterns are provided on the first insulating layers.
申请公布号 US2009155974(A1) 申请公布日期 2009.06.18
申请号 US20090349370 申请日期 2009.01.06
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 RHIE HYOUNG-SEUB
分类号 H01L21/328 主分类号 H01L21/328
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