| 摘要 |
<p>A pellicle storing container capable of reducing of abrasion powder. There is provided pellicle storing container (1) for transporting of pellicle (5), comprising pellicle membrane (6) and, supporting the pellicle membrane (6), support frame (7), which pellicle storing container (1) is equipped with tray (3), cover (2) as a lid thereof and block members (4,50,60,70) for closing up any gap between the tray (3) and the cover (2) on the outer side or inner side of the tray (3) and cover (2). The block members (4,50,60,70) can be seal member (79), clip (4), composite clip (50) and cover sheet (60). The occurrence/penetration of abrasion powder can be reduced by constituting al least a part brought into contact with the tray (3) or cover (2) by a urethane elastomer.</p> |
