发明名称 有機半導体層の形成方法および形成装置
摘要 PROBLEM TO BE SOLVED: To provide a formation method of an organic semiconductor layer having a uniform thickness.SOLUTION: A formation method of an organic semiconductor layer comprises: a base material supply process of supplying a base material 22; an atmosphere control process of controlling ambient atmosphere; and a discharge process of discharging droplets 24d of a coating liquid 24 containing an organic semiconductor material and a solvent. In the atmosphere control process, a control gas for inhibiting evaporation of the solvent contained in the droplets 24d is supplied to around a discharge device 15.
申请公布号 JP6051563(B2) 申请公布日期 2016.12.27
申请号 JP20120080037 申请日期 2012.03.30
申请人 大日本印刷株式会社 发明人 坂 田 麻紀子;武 田 利 彦
分类号 H01L21/368;H01L21/336;H01L29/786;H01L51/40;H01L51/48;H01L51/50;H05B33/10 主分类号 H01L21/368
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