发明名称 FIELD EFFECT TRANSISTOR
摘要 PROBLEM TO BE SOLVED: To provide a field effect transistor having excellent carrier control characteristics.SOLUTION: In a transistor 10, an electrode 12 of Pt is formed on a substrate 11 of silicon, or the like, a 75/25 mol% of VDF/TrFE (vinylidene fluoride-ethylene trifluoride copolymer) is applied thereon by spin coating, and then dried at 120°C thus forming a thin film of ferroelectric 13 of 150 nm thick. MoS(molybdenum disulfide) is sliced as a two-dimensional material 14, and transferred onto the ferroelectric 13 by using a tape. Thereafter, a drain electrode 15 and a source electrode 16, partially composed of Au, are formed by photolithography.SELECTED DRAWING: Figure 1
申请公布号 JP2016213280(A) 申请公布日期 2016.12.15
申请号 JP20150093772 申请日期 2015.05.01
申请人 KANAZAWA UNIV 发明人 KAWAE KEN;HIROSE SOICHIRO;KOBAYASHI TAKUHEI;NAKAJIMA TAKAFUMI
分类号 H01L21/8246;H01L21/336;H01L27/105;H01L27/28;H01L29/24;H01L29/786;H01L29/788;H01L29/792;H01L51/05 主分类号 H01L21/8246
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