LAMINATION BODY OF PIEZOELECTRIC FILM, MANUFACTURING METHOD OF THE SAME, AND OPTICAL SCANNER

摘要

PROBLEM TO BE SOLVED: To provide a lamination body which has high piezo-electric characteristics and achieves small leak current, and to provide a manufacturing method of the lamination body.SOLUTION: A lamination body has: a first piezoelectric film 25a formed on a substrate and made of a piezoelectric material; a conductive thin film 26 which is formed overlapping with the first piezoelectric film and made of a conductive oxide having the same crystal structure as the piezoelectric material; and a second piezoelectric film 25b which is formed overlapping with the conductive thin film and made of the piezoelectric material.SELECTED DRAWING: Figure 5A