| 摘要 |
PROBLEM TO BE SOLVED: To prevent reduction in alignment measurement precision by keeping temperature equivalent in an apparatus.SOLUTION: A measuring apparatus comprises an imaging part capturing measurement object in a synchronized manner with trigger pulse, and a processing part which drives the imaging part to execute measurement process for measuring position of the measurement object on the basis of the image obtained from imaging by the imaging part. The processing part supplies the trigger pulse to the imaging part for the measurement process, and also supplies the trigger pulse to the imaging part even in a case that the measurement process is not executed so that the imaging part executes dummy imaging action.SELECTED DRAWING: Figure 3 |
