SUBSTRATE CONVEYANCE APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a substrate conveyance apparatus which eliminates the need of adjustment of the height positions of a diaphragm and a transfer unit even in a case where setting of the drying temperature is changed.SOLUTION: A substrate conveyance apparatus comprises: a plurality of diaphragms which make a substrate float with an ultrasonic wave on a substrate conveyance surface; and a heater part which is provided on the rear side of the substrate conveyance surface of the diaphragm. A transfer unit for transferring the substrate to the next diaphragm is provided between the adjacent diaphragms. The transfer unit includes: a conveyance air injection part which injects the air to the substrate conveyance surface and forms a portion of the substrate conveyance surface; and a support extension part which is extended between the adjacent diaphragms. The support extension part is provided with a support air injection section which injects air toward the diaphragm. The transfer unit is supported in a non-contact manner between the diaphragms with air injected from the support air injection section, and the substrate conveyance surface of the diaphragm and the conveyance air injection part are smoothly adjusted.SELECTED DRAWING: Figure 8