MAGNETIC RECORDING FILM FORMATION SPUTTERING TARGET, AND CARBON MATERIAL USED FOR PRODUCING TARGET

摘要

PROBLEM TO BE SOLVED: To provide a high-density sputtering target that allows a granular structure magnetic thin film to be fabricated without using an expensive simultaneous sputtering apparatus, and that further reduces an amount of particles generated in sputtering.SOLUTION: There is provided a magnetic recording film formation sputtering target which is formed by moulding and sintering raw material powder containing carbon powder that contains fluorine in amount of 50 wtppm or more and that has a median size of 0.1-20 μm, and which is further subjected to isotropic hot treatment.SELECTED DRAWING: None