发明名称 MIRROR DEVICE
摘要 A mirror device may include: an optical element configured to reflect part of a laser beam and transmit the other part of the laser beam therethrough; and a holder in surface contact with the optical element to hold the optical element. A flatness of a contact surface of the holder in contact with the optical element may be equal to or smaller than a flatness of the optical element.
申请公布号 US2016315439(A1) 申请公布日期 2016.10.27
申请号 US201615201769 申请日期 2016.07.05
申请人 Gigaphoton Inc. 发明人 SUZUKI Toru;WATANABE Yukio;IGARASHI Miwa;WAKABAYASHI Osamu
分类号 H01S3/00;H05G2/00;G02B7/18;G02B27/14;G02B7/182 主分类号 H01S3/00
代理机构 代理人
主权项 1. A mirror device comprising: an optical element configured to reflect part of a laser beam and transmit the other part of the laser beam therethrough; and a holder in surface contact with the optical element to hold the optical element, wherein a flatness of a contact surface of the holder in contact with the optical element is equal to or smaller than a flatness of the optical element.
地址 Tochigi JP