| 摘要 |
PROBLEM TO BE SOLVED: To propose a vacuum pump that can restrain a foreign body from entering a gap between rotors, etc., and that can achieve a low ultimate pressure.SOLUTION: The vacuum pump comprises two rotating shafts formed so as to extend in a first axis direction, a rotor casing, rotors, and a shielding part. In the rotor casing, a rotor chamber provided along the two rotating shafts, a suction port communicating with the rotor chamber, and a discharge port communicating with the rotor chamber are formed. The rotors are attached to the two rotating shafts, and arranged in the rotor chamber. The shielding part is configured to prevent gas sucked from the suction port to the rotor chamber from directly going toward a gap between the rotors, and provided between the suction port and the inside of the rotor chamber.SELECTED DRAWING: Figure 1 |
