| 发明名称 |
SENSOR INTEGRATED METAL DIELECTRIC FILTERS FOR SOLAR-BLIND SILICON ULTRAVIOLET DETECTORS |
| 摘要 |
A filter for electromagnetic radiation including one or more dielectric spacer regions and one or more reflective regions integrated on a semiconductor substrate, the semiconductor substrate including a semiconductor photodetector, such that the filter transmits ultraviolet radiation to the semiconductor photodetector, the ultraviolet radiation having a range of wavelengths, and the filter suppresses transmission of electromagnetic radiation, having wavelengths outside the range of wavelengths, to the semiconductor photodetector. |
| 申请公布号 |
US2016273958(A1) |
申请公布日期 |
2016.09.22 |
| 申请号 |
US201615019863 |
申请日期 |
2016.02.09 |
| 申请人 |
California Institute of Technology |
发明人 |
Hoenk Michael E.;Hennessy John J.;Nikzad Shouleh;Jewell April D. |
| 分类号 |
G01J1/02;H01L31/102;G01T1/20;H01L27/146;G01N23/22;H01L31/107;H01L27/148 |
主分类号 |
G01J1/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. One or more filters for electromagnetic radiation, each of the filters comprising:
one or more dielectric spacer regions and one or more reflective regions integrated on a semiconductor substrate, the semiconductor substrate including a semiconductor photodetector, such that: each of the filters transmit ultraviolet radiation to the semiconductor photodetector, the ultraviolet radiation having a range of wavelengths, and each of the filters suppress transmission of out-of-band electromagnetic radiation, having wavelengths outside the range of wavelengths, to the semiconductor photodetector. |
| 地址 |
Pasadena CA US |
