| 发明名称 |
END EFFECTOR OF A WAFER HANDLING SYSTEM, AND WAFER HANDLING SYSTEM |
| 摘要 |
The invention relates to an end effector having an integrated prealigner which preferably comprises a movable tongue having a rotational disk. |
| 申请公布号 |
WO2016180565(A1) |
申请公布日期 |
2016.11.17 |
| 申请号 |
WO2016EP56366 |
申请日期 |
2016.03.23 |
| 申请人 |
INTEGRATED DYNAMICS ENGINEERING GMBH |
发明人 |
BIRKNER, Andreas |
| 分类号 |
H01L21/68;H01L21/687 |
主分类号 |
H01L21/68 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
