| 摘要 |
PROBLEM TO BE SOLVED: To provide a synchronized injection fluorine laser device capable of outputting stably at always. SOLUTION: The synchronized injection fluorine laser device comprises a seed laser oscillator (3) provided with a first laser chamber (2) in which the laser medium containing fluorine and buffer gas is excited to oscillate a seed laser beam (11), and an amplifying-stage laser oscillator (33) provided with a second laser chamber in which the amplification/discharge is caused in synchronism with the seed laser beam so that the laser medium containing fluorine and buffer gas is excited to amplify the seed laser beam (11). Here, resonators (36 and 38) are provided in front and rear of the second laser chamber (33) for reciprocation of the laser beam by a plurality of times, with helium sealed in the second laser chamber as a buffer gas. |
