INK JET PRINTHEAD USING PIEZO-ELECTRIC EFFECT AND A MANUFACTURING METHOD THEREOF FOR SIMPLIFYING THE STRUCTURE AND MANUFACTURING PROCESS BY INTEGRATING A NOZZLE AND AN INK MANIFOLD AND DIRECTLY ATTACHING OR FORMING A PIEZO-ELECTRIC MATERIAL TO A VIBRATING MEMBRANE, AND PREVENTING AN INK FROM FLOWING BACKWARD

摘要

PURPOSE: An ink jet printhead using piezo-electric effect and a manufacturing method thereof are provided to reduce the size and to increase resolution of printed materials by integrating a nozzle, a common ink manifold, and an ink feed-in channel with a pressure chamber by using silicon. CONSTITUTION: In an ink jet printhead using piezo-electric materials, a nozzle plate(13) and a vibrating membrane(9) are installed on both sides of a bulk silicon substrate(11) having a common ink manifold(4) and a pressure chamber(1) about one partition. A nozzle(2) of the nozzle plate and a piezo-electric plate(7) stuck on an outer side of the vibrating membrane are integrated oppositely to each other about the pressure chamber. An ink feed-in channel(3) for flowing the ink of the common ink manifold into the pressure chamber is formed at the partition. A silicon dioxide layer(12) or a silicon nitride layer(14) is formed on an upside of both partitions in the pressure chamber, the upside of the partition of the common ink manifold, and both sides of the nozzle plate to prevent the ink from reacting to silicon.