SCANNING APPARATUS, CONFOCAL OBSERVATION APPARATUS AND DISK SCANNING APPARATUS

摘要

A scanning apparatus includes a light source, a spatial light modulator that modulates an incident beam of light on a first reflection surface, an illumination lens that irradiates the spatial light modulator with a beam of light from the light source and that refracts a principal ray of a beam of light modulated by the spatial light modulator so that an angle between the principal ray and an optical axis of the illumination lens decreases, and a first reflector that directs, toward the illumination lens, a beam of light by reflecting the beam of light multiple times between the illumination lens and a front focal plane of the illumination lens, the beam of light being modulated by the spatial light modulator and entering through the illumination lens.

主权项

1. A scanning apparatus comprising:
a light source; a spatial light modulator configured to have a flat first reflection surface and to modulate an incident beam of light on the first reflection surface; an illumination lens configured to irradiate the spatial light modulator with a beam of light from the light source and to refract a principal ray of a beam of light modulated by the spatial light modulator so that an angle between the principal ray and an optical axis of the illumination lens decreases; and a first reflector that directs, toward the illumination lens, a beam of light by reflecting the beam of light multiple times between the illumination lens and a front focal plane of the illumination lens, the beam of light being modulated by the spatial light modulator and entering through the illumination lens.