发明名称 WORKPIECE GRINDING METHOD AND GRINDING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a workpiece grinding method which achieves improvement of the efficiency of dressing to improve the productivity, and to provide a grinding device.SOLUTION: In a workpiece grinding method, a rear surface of a workpiece is ground. The workpiece grinding method includes: a grinding step in which a rotating grind stone 23 is placed in contact with a part of the rear surface to grind the rear surface; and a spray step in which a mixture K of a fluid and fine particles is sprayed toward the grind stone 23 in a non-action position NP, at which a grinding wheel does not contact with the rear surface, during rotation of the grind stone 23.SELECTED DRAWING: Figure 5
申请公布号 JP2016179533(A) 申请公布日期 2016.10.13
申请号 JP20150061481 申请日期 2015.03.24
申请人 DISCO ABRASIVE SYST LTD 发明人 MICHAEL WILLIAM GADD;MATSUMOTO SACHIKO
分类号 B24B53/02;B24B55/06;H01L21/304 主分类号 B24B53/02
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