发明名称 |
PLASMA DEPOSITION APPARATUS AND METHOD FOR MAKING SOLAR CELLS |
摘要 |
<p>A plasma deposition apparatus for making solar cells comprising a conveyor having a longitudinal axis for supporting at least one substrate; at least two modules each having at least one plasma torch for depositing a layer of a reaction product on the at least one substrate, the at least one plasma torch located a distance from the at least one substrate; a chamber for containing the conveyor and the at least two modules; and an exhaust system. In another embodiment, the plasma deposition apparatus for making solar cells comprises: means for supporting a substrate; means for supplying reactants; plasma torch means for depositing a product on the substrate, the plasma torch means located a distance from the substrate; and means for oscillating the plasma torch means relative to the substrate.</p> |
申请公布号 |
WO2007120776(A8) |
申请公布日期 |
2009.03.05 |
申请号 |
WO2007US09046 |
申请日期 |
2007.04.13 |
申请人 |
SILICA TECH, LLC;ASLAMI, MOHD, A.;WU, DAU |
发明人 |
ASLAMI, MOHD, A.;WU, DAU |
分类号 |
C23C16/507;C23C16/54;H01L31/20 |
主分类号 |
C23C16/507 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|