| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring method of a light-scanning optical system capable of accurately measuring beam profile of the light-scanning optical system outputting a plurality of laser beams, capable of shortening measurement time and capable of simplifying the measurement operation. SOLUTION: The plurality of the laser beams are outputted in the form of pulses, while making the ROS (raster optical scanner) a scanning state, making a timing different, measure the beam profile based on the spot images SPA, SPB by taking images IM of spots SPA, SPB of each laser beam, without overlapping each other. Thus, the plurality of beam spots will not overlap, and the profile beam intervals of the plurality of beams, and the bean diameters can be measured simultaneously, because of measuring in the scanning state, the profile beam interval, and the beam diameter can be measured accurately. COPYRIGHT: (C)2007,JPO&INPIT
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