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发明名称
摘要
申请公布号	FR2154294(A1)	申请公布日期	1973.05.11
申请号	FR19710034698	申请日期	1971.09.27
申请人	SILEC SEMI CONDUCTEURS,FR	发明人
分类号	H01L21/033;H01L21/225;H01L21/311;H01L21/316;(IPC1-7):B01J17/00;H01L7/00	主分类号	H01L21/033
代理机构		代理人
主权项
地址

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