| 摘要 |
A single substrate is exposed in a single pumpdown to vapor deposition from a plurality of evaporation sources. A photo processed mask for each source is mounted on a linearly movable carriage, moving the masks sequentially beneath the substrate for contact with it. The carriage, the substrate holder assembly, a shutter for selecting vapor sources, as well as the sources themselves are all mounted and contained within a Pyrex cross, sealed at each of its ports to sustain a vacuum.
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