| 摘要 |
A detector of blemishes in a surface includes a scanning station able to move relative to the surface, the scanning station comprising a laser capable of emitting a continuous beam of radiation, optical means for focussing the radiation from the laser such that the radiation intersects the surface as a line extending parallel to the direction of said relative motion, scanning means for causing the beam to scan the surface perpendicular to the direction of said relative motion and detection means, responsive to the detection of changes in radiation diffusely reflected from, or transmitted by, the surface, to produce an output signal. The intersection of the surface by the radiation as a line enables the surface to be moved past the scanning station at an increased speed while permitting a representative proportion of the surface to be scanned by the radiation.
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