METHOD OF DRY POWDER ETCHING,申请号GB19710041006-传众专利搜索

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发明名称	METHOD OF DRY POWDER ETCHING
摘要
申请公布号	GB1357127(A)	申请公布日期	1974.06.19
申请号	GB19710041006	申请日期	1971.09.02
申请人	STALEY MFG CO A E	发明人
分类号	G03F7/004;G03F7/28;(IPC1-7):G03C5/00;G03C5/40	主分类号	G03F7/004
代理机构		代理人
主权项
地址

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