发明名称 |
Method of fabricating semiconductor cleaners |
摘要 |
A method of fabricating a cleaning solvent for removing a residue, the method comprising: compiling a database that includes solvents and a set of solvent solubility parameters for a large plurality of perspective solvents; selecting from the large plurality of perspective solvents a small plurality of test solvents; measuring an amount of the residue dissolved by each member of the small plurality of test solvents; calculating a set of solute solubility parameters for the residue by combining solvent solubility parameters of the small plurality of test solvents in proportion to an amount of residue dissolved by each member of the small plurality of test solvents; and mixing at least two solvents from the large plurality of perspective solvents to form a mixture so that a set of solvent solubility parameters for the mixture approximates the set of solute solubility parameters for the residue. |
申请公布号 |
US9529366(B2) |
申请公布日期 |
2016.12.27 |
申请号 |
US201314133337 |
申请日期 |
2013.12.18 |
申请人 |
Infineon Technologies AG |
发明人 |
Weber Frank |
分类号 |
B08B7/04;G05D11/02;C11D11/00;H01L21/02;G06F19/00 |
主分类号 |
B08B7/04 |
代理机构 |
Slater Matsil, LLP |
代理人 |
Slater Matsil, LLP |
主权项 |
1. A method of fabricating a cleaning solvent for removing a residue, the method comprising:
compiling a database that includes solvents and a set of solvent solubility parameters for a large plurality of perspective solvents; selecting from the large plurality of perspective solvents a small plurality of test solvents; measuring an amount of the residue dissolved by each member of the small plurality of test solvents; calculating a set of solute solubility parameters for the residue by combining solvent solubility parameters of the small plurality of test solvents in proportion to an amount of residue dissolved by each member of the small plurality of test solvents; and mixing at least two solvents from the large plurality of perspective solvents to form a mixture so that a set of solvent solubility parameters for the mixture approximates the set of solute solubility parameters for the residue. |
地址 |
Neubiberg DE |