发明名称 CHROMIUM OXIDE PHOTOMASK MATERIAL AND THE PRODUCTION THEREOF
摘要 1373051 Chromium oxide coating ULVAC CORP 19 May 1972 [24 May 1971] 23748/72 Heading C1A [Also in Divisions G2 and B6] Chromic oxide or metallic chromium is heated under an oxidizing atmosphere of O2 or an O2/N2 mixture at a pressure of 0À5 Î 10<-4> to 5 Î 10<-4> Torr and at an O2 partial pressure of 0À1 Î 10<-4> to 5 x 10<-4> Torr to generate a vapour which is deposited on a glass substrate, positioned within the atmosphere, to form a coating of non-stoichiometric chromium oxide.
申请公布号 GB1373051(A) 申请公布日期 1974.11.06
申请号 GB19720023748 申请日期 1972.05.19
申请人 ULVAC CORPORATION 发明人
分类号 C03C17/245;C23C14/00;G03F1/00;G03F1/54;G03F1/68;G03F1/80 主分类号 C03C17/245
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