Specimen casing for electron microscope adjustable table - has surrounding conductive cage for electron back-scatter measuring

摘要

The specimen casing is insertable in the specimen table and is surrounded by an insulatingly mounted, electrically conductive cage for measuring the electron back-scatter at the specimen. Through the cage wall protrudes a component, conductively connected with the same, which is driven by an external drive so that in one end position it bounds the cage part facing the electron source against the specimen, thus preventing the electron passage to the specimen. In its other end position it permits the electron flow. The component part may be formed by a slider displaceable transversely to the casing axis. The slider may be guided in the specimen casing to enable a common movement of the cage and the slider in the direction of the casing axis.