METHOD AND DEVICE FOR POLISHING PENETRATION PASSAGE OF THREE-DIMENSIONAL STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a polishing method of a penetration passage capable of polishing more properly a penetration passage of a three-dimensional structure with a sufficient amount of abrasive grains without using a cylinder.SOLUTION: Polishing of a penetration passage is carried out by circulating a polishing fluid through the penetration passage from a charged closed vessel into which the polishing fluid containing abrasive grains and liquid is charged. Especially, a dispersion treatment for dispersing abrasive grains into liquid in the charged closed vessel into which gas for circulating the polishing fluid into the penetration passage is supplied.SELECTED DRAWING: Figure 1