Apparatus for liquid-phase epitaxial growth

摘要

An apparatus for liquid-phase epitaxial growth of a semiconductor including a crucible comprising an outer member having a cylindrical large bore at the upper end thereof and at least one substrate-carrying recess at the bottom wall of the large bore, and a cylindrical basic inner member snugly and slidably accommodated in the bore and having a solution-containing bore at the lower end wall thereof which contacts with the bottom of the bore.