发明名称 |
High-speed germanium on silicon avalanche photodiode |
摘要 |
A high-speed germanium on silicon (Ge/Si) avalanche photodiode may include a substrate layer, a bottom contact layer disposed on the substrate layer, a buffer layer disposed on the bottom contact layer, an electric field control layer disposed on the buffer layer, an avalanche layer disposed on the electric field control layer, a charge layer disposed on the avalanche layer, an absorption layer disposed on the charge layer, and a top contact layer disposed on the absorption layer. The electric field contact layer may be configured to control an electric field in the avalanche layer. |
申请公布号 |
US9478689(B2) |
申请公布日期 |
2016.10.25 |
申请号 |
US201514961675 |
申请日期 |
2015.12.07 |
申请人 |
SIFOTONICS TECHNOLOGIES CO., LTD. |
发明人 |
Huang Mengyuan;Cai Pengfei;Wang Liangbo;Li Su;Chen Wang;Hong Ching-yin;Pan Dong |
分类号 |
H01L31/107;H01L31/0392 |
主分类号 |
H01L31/107 |
代理机构 |
Han IP Corporation |
代理人 |
Han IP Corporation ;Han Andy M. |
主权项 |
1. An apparatus, comprising:
a germanium on silicon (Ge/Si) avalanche photodiode comprising:
a substrate;a bottom contact layer disposed on the substrate;a buffer layer disposed on the bottom contact layer;an electric field control layer disposed on the buffer layer;an avalanche layer disposed on the electric field control layer;a charge layer disposed on the avalanche layer;an absorption layer disposed on the charge layer; anda top contact layer disposed on the absorption layer, wherein the electric field contact layer is configured to control an electric field in the avalanche layer. |
地址 |
Grand Cayman KY |