发明名称 High-speed germanium on silicon avalanche photodiode
摘要 A high-speed germanium on silicon (Ge/Si) avalanche photodiode may include a substrate layer, a bottom contact layer disposed on the substrate layer, a buffer layer disposed on the bottom contact layer, an electric field control layer disposed on the buffer layer, an avalanche layer disposed on the electric field control layer, a charge layer disposed on the avalanche layer, an absorption layer disposed on the charge layer, and a top contact layer disposed on the absorption layer. The electric field contact layer may be configured to control an electric field in the avalanche layer.
申请公布号 US9478689(B2) 申请公布日期 2016.10.25
申请号 US201514961675 申请日期 2015.12.07
申请人 SIFOTONICS TECHNOLOGIES CO., LTD. 发明人 Huang Mengyuan;Cai Pengfei;Wang Liangbo;Li Su;Chen Wang;Hong Ching-yin;Pan Dong
分类号 H01L31/107;H01L31/0392 主分类号 H01L31/107
代理机构 Han IP Corporation 代理人 Han IP Corporation ;Han Andy M.
主权项 1. An apparatus, comprising: a germanium on silicon (Ge/Si) avalanche photodiode comprising: a substrate;a bottom contact layer disposed on the substrate;a buffer layer disposed on the bottom contact layer;an electric field control layer disposed on the buffer layer;an avalanche layer disposed on the electric field control layer;a charge layer disposed on the avalanche layer;an absorption layer disposed on the charge layer; anda top contact layer disposed on the absorption layer, wherein the electric field contact layer is configured to control an electric field in the avalanche layer.
地址 Grand Cayman KY