| 摘要 |
1408294 Coating with oxides, borides or nitrides BATTELLE MEMORIAL INSTITUTE 6 July 1972 [7 July 1971] 31826/72 Heading C1A [Also in Divisions B2 and C7] A cemented carbide is coated up to a thickness of 50 microns with the oxide, nitride or boride of Mg, Be, or elements of Groups III to VI of the periodic table, other than oxides of Al and Zr, by deposition from the vapour phase, e.g. by evaporation, chemical vapour deposition or sputtering. Spinel mixed oxides, e.g. MgAl 2 O 4 or MgCr 2 O 4 may be deposited by reacting magnesium chloride and aluminium chloride or chromium oxychloride with a mixture of hydrogen and carbon dioxide. BN, A1N, Si 3 N 4 and VN may be separately deposited by reacting a halogenated compound with are deposited by reacting BCl 3 with the halogenated metal compound. Cr 2 O 3 , MgO, BeO, CeO 2 , ThO 2 or HfO 2 may be deposited by reaction of the corresponding halognated compound with a mixture of carbon dioxide and hydrogen. Nitrides may be Si 3 N 4 , VN, NbN, BN, ThN, TiN, ZrN, TaN or HfN. Borides may be Th, Zr, Hf, Nb, Ta, Ti. |
