| 发明名称 |
Vacuum coating apparatus |
| 摘要 |
Vacuum coating apparatus having isolatable coating and vacuum chambers whose volumes are correlated to each other to minimize contamination and pump-down time, with the coating chamber having a closure means mounting a substrate holder for positioning substrates in an evaporant stream from a vapor source contained in the vacuum chamber.
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| 申请公布号 |
US3921572(A) |
申请公布日期 |
1975.11.25 |
| 申请号 |
US19740445199 |
申请日期 |
1974.02.25 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BRUNNER, ROLF H.;CARBONE, QUIEDO J.;LESTER, WILLIAM C. |
| 分类号 |
C23C14/24;C23C14/56;H01L21/285;(IPC1-7):C23C13/08 |
主分类号 |
C23C14/24 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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