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发明名称
2 JIGENTOKUSEISOKUTEISOCHI
摘要
申请公布号
JPS5143680(A)
申请公布日期
1976.04.14
申请号
JP19740116943
申请日期
1974.10.11
申请人
IWASAKI TSUSHINKI KK
发明人
MITSUISHI SABURO
分类号
G01R31/26;G01R19/00;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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