Method of operating a quartz fluidized bed reactor for the production of silicon

摘要

In order to prevent breakage of a quartz fluidized bed reactor utilized in the production of silicon, the reactor is cooled as soon as a thin layer of silicon is formed on the reactor walls and then reheated to continue silicon growth. In this manner, the thin layer of silicon shatters and forms a weak foundation for subsequent silicon deposition on the reactor wall when the silicon deposition is continued. Subsequently deposited silicon on the walls continuously peels off without breaking the reactor.