| 摘要 |
PROBLEM TO BE SOLVED: To correctly detect a crack even in an inspection object in which a plurality of areas whose optical characteristics are different from each other coexist within one inspection object plane.SOLUTION: An image recognition device 1 comprises: a bright field illumination image-capturing unit 10 for acquiring a bright field image formed by image-capturing an inspection object under bright field illumination; a dark field illumination image-capturing unit 12 for acquiring a dark field image formed by image-capturing the same inspection object under dark field illumination; a crack point sequence generation unit 11 for generating a first sequence of crack points on the basis of the bright field image; a crack point sequence generation unit 13 for generating a second sequence of crack points on the basis of the dark field image; and a crack concatenation unit 14 for generating a concatenated sequence of crack pints formed by concatenating the first sequence of crack points and the second sequence of crack points.SELECTED DRAWING: Figure 1 |
