| 摘要 |
A pressure connection concept for pressure sensor modules is provided, using which the influence of assembly-related stresses in the sensor system on the sensor diaphragm and accordingly on the measuring signal detection is kept very low. The sensor system includes a sensor module for pressure detection and a connecting piece and at least one seal for coupling the sensor module to a measuring system. The sensor module includes at least one sensor element having a diaphragm and means for signal detection. Together with the means for signal detection, the sensor element is provided with packaging having a pressure connection opening and electrical contacts. A pressure channel is provided in the connecting piece, the pressure channel being coupled to the pressure connection opening of the sensor module using the seal. The packaging of the sensor module includes a tube-shaped projection which forms the pressure connection opening, and the pressure channel of the connecting piece terminates in a connecting tube. The tube-shaped projection of the sensor module and the connecting tube of the connecting piece fit into each other, and the seal designed as a radial seal is situated between the walls of the tube-shaped projection and the connecting tube. |
